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This book covers two most outstanding issues to be challenged in future research for IT platform, i.e., device and energy. Three key devices, FINFET, TunnelFET, and electromechanical nano switch are explained by leading researchers with extensive details useful for practical applications. Energy issues are also covered in a tutorial fashion from material, device, to innovative circuits design. The strength of this book lies in its holistic approach dealing with material trend, state-of-the-art of key devices, fresh examples of circuits and systems applications. Unique feature of this book is that the chapters are complementary and fit to each other. It is an excellent guide to the essential technology for smart sensors for IoT (Internet of Things). Redundancy among chapters is minimal as the authors have worked as a team under the auspice of GFP(Global Frontier Project), largest-scale funded research in Korea.§§This book contains ample reference and with about 200 figures, introduces the reader to the general subject in a tutorial style and the state-of-the-art result at the same time, which allows it to be used as a guide for beginning researchers in each area as well.§